Madou, Marc J.
Fundamentals of microfabrication and nanotechnology vol. III : from MEMS to bio-MEMS and bio-NEMS : manufacturing techniques and applications - 3rd ed. - Boca Raton CRC Press 2012 - xiii, 636p. : ill. (some col.), photos.(some col.), tables, Index included
9781420055160
MICROELECTRONICS
INTEGRATED CIRCUITS-DESIGN AND CONSTRUCTION
Microelectromechanical Systems
Microfabrication
Nanotechnology
621.382:620.3 / M3
Fundamentals of microfabrication and nanotechnology vol. III : from MEMS to bio-MEMS and bio-NEMS : manufacturing techniques and applications - 3rd ed. - Boca Raton CRC Press 2012 - xiii, 636p. : ill. (some col.), photos.(some col.), tables, Index included
9781420055160
MICROELECTRONICS
INTEGRATED CIRCUITS-DESIGN AND CONSTRUCTION
Microelectromechanical Systems
Microfabrication
Nanotechnology
621.382:620.3 / M3