TY  - GEN
AU  - Madou, Marc J.
TI  - Fundamentals of microfabrication and nanotechnology vol. III : from MEMS to bio-MEMS and bio-NEMS : manufacturing techniques and applications
SN  - 9781420055160
PY  - 2012///
CY  - Boca Raton
PB  - CRC Press
KW  - MICROELECTRONICS
KW  - INTEGRATED CIRCUITS-DESIGN AND CONSTRUCTION
KW  - Microelectromechanical Systems
KW  - Microfabrication
KW  - Nanotechnology
ER  -